 |
 |
Our world-leading expertise in tribo-metrology
has just been utilized in the latest product - CMP Tester. It is based on
the latest technological advances and is the most precision and unique
instrument of its kind. This automated instrument is a must for CMP users
and suppliers as the means for understanding, optimization and control of
CMP processes, machines and materials.
CMP
Tester description |
PDF
file, 556 Kb
|
This instrument is essentially a bench-top CMP machine with a number of signals monitored and analyzed in-situ. It includes simultaneous real-time processing of micro-tribological information on the following signals:
-
normal loads and friction forces (torques) via our proprietary sensors, in both wafer-pad and conditioner-pad interfaces,
-
contact acoustic noise (elastic waves) via our proprietary sensors and amplifiers, in both wafer-pad and conditioner-pad interfaces,
-
temperature of the incoming slurry, pad surface and outgoing process waste,
-
pad wear depth and cut rate,
-
real-time data-acquisition and analysis.
CMP Tester Diagram | PDF file, 150 Kb
Here you can see the CETR presentation of "Quantitative Functional Testing of Consumables Using a Bench-Top CMP Tester" the CMPUG Meeting of the Northern California Chapter of American Vacuum Society, September 2001.
Published Papers
