Center for Tribology Research

Chemical-Mechanical Planarization (CMP) Testing

American Society  for Testing Materials (ASTM) News:

ASTM Abrasive Wear Task Group Begins Work on Chemical-Mechanical Planarization Standard


Chemical-Mechanical Planarization Tester

CMP Bench-Top Machine for Materials Testing and Process Development

Published Papers

Application Notes on Materials Testing

Application Notes on Process Development


PadProbe for Chemical-Mechanical Polishing Test

PadProbeTM for CMP Process Monitoring in the Fab

Published Papers

Application Notes


PadProbe for Chemical-Mechanical Polishing Test

Post-CMP Cleaning Applications: Challenges and Opportunities
2008 MIIC

Evaluation of Properties of Cleaning Brushes (Sponges)
on The UMT Series Tribometer


Contact CETR to discuss your testing needs in detail, for more information and pricing or to set up an appointment to visit our lab in Northern California. You will surely be pleased with our wide expertise, unique equipment and friendly effective services.