ASTM Standard Tests
Automotive & Aerospace
Bio Materials
Coating & Thin Films
Elastomers
Electric Contacts
Expert Testing & Witnessing
Fasteners
High Temp Materials
Lubricants
Macro Indentation
Magnetic & Optical Drives
Paper
Semiconductor Materials
Skin Tests
Tribology Research
Post-CMP Cleaning Applications: Challenges and Opportunities
2008 CMP-MIC Conference, March 2008
R.K. Singh, D.W. Stockbower and C.R. Wargo Entegris, Inc.
V. Khosla, M. Vinogradov and N.V. Gitis Center for Tribology, Campbell, CA 95008
Copyright © 2006- 2011 Bruker Corporation. Website design by LunaGraphica
