Published Papers - UMT

Post-CMP Cleaning Applications: Challenges and Opportunities

2008 CMP-MIC Conference, March 2008

R.K. Singh, D.W. Stockbower and C.R. Wargo
Entegris, Inc.

V. Khosla, M. Vinogradov and N.V. Gitis
Center for Tribology, Campbell, CA 95008