Published Papers - PadProbe™ for Monitoring and Control of Pad Surface
Insitu CMP Monitoring and Control via Pad Surface Friction and Wear Data Collection (PDF)
2007 CMP-MIC Conference, March 2007
John H. Givens, Ph.D., and Michael Vinogradov
Center for Tribology, Campbell, CA 95008
CMP In-situ Friction Force Monitoring (PDF)
2006 VMIC Conference,
September 2006
Yohei Yamada, Masanori Kawakubo and Nobuhiro Konishi
Micro Device Division, Hitachi, Ltd., Japan
CMP Process and Consumables Evaluation
with Padprobe™(PDF)
Proceeding
of 10th CMP-MIC Conference,
February 2005
Sharath Hosali, Eric Busch
SEMATECH, Austin, TX 78741
Michael Vinogradov, Norm Gitis
Center for Tribology, Campbell, CA 95008
CMP Process and Consumables Evaluation with PadProbe™
(PDF)
Proceeding
of 5th AVS International Conference on Microelectronics and Interfaces, March
2004
Jingxun Fang, Kenneth Davis
IBM, East Fishkill, NY 12533
Norm Gitis, Michael Vinogradov
Center for Tribology, Campbell, CA 95008
CMP Process and Consumables Evaluation with PadProbe™
(PDF)
Proceeding
of 20th VMIC Conference, September 2003
Jingxun Fang, Kenneth Davis
IBM, East Fishkill, NY 12533
Norm Gitis, Michael Vinogradov
Center for Tribology, Campbell, CA 95008
CMP In-Situ Pad Condition Monitoring with PadProbe™
(PDF)
Proceedings of the Eighth International
CMP-MIC
Conference,
February
19-21 2003,Marina Del Rey, CA
Bill Kalenian, Brian Pautsch, Bryan Sennett
Dr. Norm Gitis, Michael Vinogradov
Center for Tribology, Inc., Campbell, CA 95008
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