Application Notes - effective utilization of the CMP Tester for materials testing

In the documents below one can see the results of  the following tests on the CMP Tester model CP-4:

Comparative Functional Tests of Polishing Pads | PDF file, 1 Mb 

Functional Properties of Slurries | PDF file, 366 Kb

Testing Conditioning Discs | PDF file, 1,22 Mb

Friction Tests of Retaining Rings | PDF file, 376 Kb

Deformation Test of Polishing Pads | PDF file, 484 Kb

Pad Deformation Tests on CETR Tester | PDF file, 230 Kb

Nano-Scale Defectoscopy | PDF file, 760 Kb