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SouthWest Test Workshop 2004
June 7, 2004
FORMFACTOR, INC.
Predictive Probing Summary
Customer Site Evaluation
•Predictive Probing Summary
–Evaluated significant parameters for scrub mark
§Design parameters selected for field evaluation
–Characterized Cres to high resolution
•Customer evaluation
–Several cards were evaluated at customer site
§Varied K, tip size and number of touchdowns
§Probed test wafers with production metal stack
§Cres monitored for all tests
–Objectives:
§Define design parameters for qualification
§Define probing recipe for qualification
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