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SouthWest Test Workshop 2004
June 7, 2004
FORMFACTOR, INC.
Predictive Probing Cres Evaluation
Force vs. Resistance – Holm Theory 
•Aluminum Material Properties (from MatWeb):
– Hal= 15 Kg/mm2
– ral= 2.7E-6 W-cm
– sf is unknown.
•Since all other variables are known, the film resistivity for the Aluminum case can be estimated from the experimental data.
– sf ~ 2.5E-7 W-cm2
–Establishing this material parameter allows for more accurate estimates of Cres for future applications.
•