p. 9
SouthWest Test Workshop 2004
June 7, 2004
FORMFACTOR, INC.
Predictive Probing Evaluation
of Pressure Parameters
•Pressure
is a first order variable for both Scrub mark and Cres.
–Pressure=Applied Force/Contact Area
•FFI
design parameters and probing recipes can be optimized to control
pressure for specific applications.
–Overtravel
–K
–Tip size
Force
Area
K
OT
Pressure
Tip Size